Enabling technology for MEMS and nanodevices

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This softcover edition of the eponymous volume from the successful ""Advanced Micro & Nanosystems"" series covers all aspects of fabrication of MEMS under CMOS-compatible conditions from design to implementation.It examines the various routes and methods to combine electronic...

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Autores principales: Baltes, Henry, Brand, Oliver, Fedder, Gary K, Hierold, Christofer, Korvink, Jan G, Tabata, Osamu
Lenguaje:eng
Publicado: Wiley 2013
Materias:
Engineering
Acceso en línea:http://cds.cern.ch/record/1618468
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author Baltes, Henry
Brand, Oliver
Fedder, Gary K
Hierold, Christofer
Korvink, Jan G
Tabata, Osamu
author_facet Baltes, Henry
Brand, Oliver
Fedder, Gary K
Hierold, Christofer
Korvink, Jan G
Tabata, Osamu
author_sort Baltes, Henry
collection CERN
description This softcover edition of the eponymous volume from the successful ""Advanced Micro & Nanosystems"" series covers all aspects of fabrication of MEMS under CMOS-compatible conditions from design to implementation.It examines the various routes and methods to combine electronics generated by the CMOS technology with novel micromechanical parts into one-chip solutions. Various approaches, fundamental and technological aspects as well as strategies leading to different types of functionalities and presented in detail.For the practicing engineer as well as MSc and PhD students on MEMS cours
id cern-1618468
institution Organización Europea para la Investigación Nuclear
language eng
publishDate 2013
publisher Wiley
record_format invenio
spelling cern-16184682021-04-21T21:58:04Zhttp://cds.cern.ch/record/1618468engBaltes, HenryBrand, OliverFedder, Gary KHierold, ChristoferKorvink, Jan GTabata, OsamuEnabling technology for MEMS and nanodevicesEngineeringThis softcover edition of the eponymous volume from the successful ""Advanced Micro & Nanosystems"" series covers all aspects of fabrication of MEMS under CMOS-compatible conditions from design to implementation.It examines the various routes and methods to combine electronics generated by the CMOS technology with novel micromechanical parts into one-chip solutions. Various approaches, fundamental and technological aspects as well as strategies leading to different types of functionalities and presented in detail.For the practicing engineer as well as MSc and PhD students on MEMS coursWileyoai:cds.cern.ch:16184682013
spellingShingle Engineering
Baltes, Henry
Brand, Oliver
Fedder, Gary K
Hierold, Christofer
Korvink, Jan G
Tabata, Osamu
Enabling technology for MEMS and nanodevices
title Enabling technology for MEMS and nanodevices
title_full Enabling technology for MEMS and nanodevices
title_fullStr Enabling technology for MEMS and nanodevices
title_full_unstemmed Enabling technology for MEMS and nanodevices
title_short Enabling technology for MEMS and nanodevices
title_sort enabling technology for mems and nanodevices
topic Engineering
url http://cds.cern.ch/record/1618468
work_keys_str_mv AT balteshenry enablingtechnologyformemsandnanodevices
AT brandoliver enablingtechnologyformemsandnanodevices
AT feddergaryk enablingtechnologyformemsandnanodevices
AT hieroldchristofer enablingtechnologyformemsandnanodevices
AT korvinkjang enablingtechnologyformemsandnanodevices
AT tabataosamu enablingtechnologyformemsandnanodevices

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