Enabling technology for MEMS and nanodevices

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This softcover edition of the eponymous volume from the successful ""Advanced Micro & Nanosystems"" series covers all aspects of fabrication of MEMS under CMOS-compatible conditions from design to implementation.It examines the various routes and methods to combine electronic...

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Detalles Bibliográficos
Autores principales: Baltes, Henry, Brand, Oliver, Fedder, Gary K, Hierold, Christofer, Korvink, Jan G, Tabata, Osamu
Lenguaje:eng
Publicado: Wiley 2013
Materias:
Engineering
Acceso en línea:http://cds.cern.ch/record/1618468

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