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Lecture notes on principles of plasma processing
| Autores principales: | , |
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| Lenguaje: | eng |
| Publicado: |
Springer
2003
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| Materias: | |
| Acceso en línea: | https://dx.doi.org/10.1007/978-1-4615-0181-7 http://cds.cern.ch/record/1624332 |
| _version_ | 1780933487027552256 |
|---|---|
| author | Chen, Francis F Chang, Jane P |
| author_facet | Chen, Francis F Chang, Jane P |
| author_sort | Chen, Francis F |
| collection | CERN |
| id | cern-1624332 |
| institution | Organización Europea para la Investigación Nuclear |
| language | eng |
| publishDate | 2003 |
| publisher | Springer |
| record_format | invenio |
| spelling | cern-16243322021-04-21T21:45:42Zdoi:10.1007/978-1-4615-0181-7http://cds.cern.ch/record/1624332engChen, Francis FChang, Jane PLecture notes on principles of plasma processingOther Fields of PhysicsSpringeroai:cds.cern.ch:16243322003 |
| spellingShingle | Other Fields of Physics Chen, Francis F Chang, Jane P Lecture notes on principles of plasma processing |
| title | Lecture notes on principles of plasma processing |
| title_full | Lecture notes on principles of plasma processing |
| title_fullStr | Lecture notes on principles of plasma processing |
| title_full_unstemmed | Lecture notes on principles of plasma processing |
| title_short | Lecture notes on principles of plasma processing |
| title_sort | lecture notes on principles of plasma processing |
| topic | Other Fields of Physics |
| url | https://dx.doi.org/10.1007/978-1-4615-0181-7 http://cds.cern.ch/record/1624332 |
| work_keys_str_mv | AT chenfrancisf lecturenotesonprinciplesofplasmaprocessing AT changjanep lecturenotesonprinciplesofplasmaprocessing |