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Lecture notes on principles of plasma processing

Detalles Bibliográficos
Autores principales:	Chen, Francis F, Chang, Jane P
Lenguaje:	eng
Publicado:	Springer 2003
Materias:	Other Fields of Physics
Acceso en línea:	https://dx.doi.org/10.1007/978-1-4615-0181-7 http://cds.cern.ch/record/1624332

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