Cargando…
Nanolithography: the art of fabricating nanoelectronic and nanophotonic devices and systems
Lithography is the process of patterning and etching to create integrated circuits and other devices on semiconductor wafers. Photolithography cannot be scaled down much further so in order to cope with the future reduction in size of semiconductor chips to nanoscale dimensions, scientists have turn...
| Autor principal: | |
|---|---|
| Lenguaje: | eng |
| Publicado: |
Woodhead Publ.
2014
|
| Materias: | |
| Acceso en línea: | http://cds.cern.ch/record/1644592 |