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Rapid thermal processing of semiconductors

Rapid thermal processing has contributed to the development of single wafer cluster processing tools and other innovations in integrated circuit manufacturing environments Borisenko and Hesketh review theoretical and experimental progress in the field, discussing a wide range of materials, processes...

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Detalles Bibliográficos
Autores principales: Borisenko, Victor E, Hesketh, Peter J
Lenguaje:eng
Publicado: Springer 1997
Materias:
Acceso en línea:https://dx.doi.org/10.1007/978-1-4899-1804-8
http://cds.cern.ch/record/1663720