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Rapid thermal processing of semiconductors
Rapid thermal processing has contributed to the development of single wafer cluster processing tools and other innovations in integrated circuit manufacturing environments Borisenko and Hesketh review theoretical and experimental progress in the field, discussing a wide range of materials, processes...
| Autores principales: | , |
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| Lenguaje: | eng |
| Publicado: |
Springer
1997
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| Materias: | |
| Acceso en línea: | https://dx.doi.org/10.1007/978-1-4899-1804-8 http://cds.cern.ch/record/1663720 |
| _version_ | 1780935225547685888 |
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| author | Borisenko, Victor E Hesketh, Peter J |
| author_facet | Borisenko, Victor E Hesketh, Peter J |
| author_sort | Borisenko, Victor E |
| collection | CERN |
| description | Rapid thermal processing has contributed to the development of single wafer cluster processing tools and other innovations in integrated circuit manufacturing environments Borisenko and Hesketh review theoretical and experimental progress in the field, discussing a wide range of materials, processes, and conditions They thoroughly cover the work of international investigators in the field |
| id | cern-1663720 |
| institution | Organización Europea para la Investigación Nuclear |
| language | eng |
| publishDate | 1997 |
| publisher | Springer |
| record_format | invenio |
| spelling | cern-16637202021-04-21T21:19:28Zdoi:10.1007/978-1-4899-1804-8http://cds.cern.ch/record/1663720engBorisenko, Victor EHesketh, Peter JRapid thermal processing of semiconductorsEngineeringRapid thermal processing has contributed to the development of single wafer cluster processing tools and other innovations in integrated circuit manufacturing environments Borisenko and Hesketh review theoretical and experimental progress in the field, discussing a wide range of materials, processes, and conditions They thoroughly cover the work of international investigators in the fieldSpringeroai:cds.cern.ch:16637201997 |
| spellingShingle | Engineering Borisenko, Victor E Hesketh, Peter J Rapid thermal processing of semiconductors |
| title | Rapid thermal processing of semiconductors |
| title_full | Rapid thermal processing of semiconductors |
| title_fullStr | Rapid thermal processing of semiconductors |
| title_full_unstemmed | Rapid thermal processing of semiconductors |
| title_short | Rapid thermal processing of semiconductors |
| title_sort | rapid thermal processing of semiconductors |
| topic | Engineering |
| url | https://dx.doi.org/10.1007/978-1-4899-1804-8 http://cds.cern.ch/record/1663720 |
| work_keys_str_mv | AT borisenkovictore rapidthermalprocessingofsemiconductors AT heskethpeterj rapidthermalprocessingofsemiconductors |