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Scanning electron microscopy: physics of image formation and microanalysis
Scanning Electron Microscopy provides a description of the physics of electron-probe formation and of electron-specimen interations The different imaging and analytical modes using secondary and backscattered electrons, electron-beam-induced currents, X-ray and Auger electrons, electron channelling...
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| Lenguaje: | eng |
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Springer
1998
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| Acceso en línea: | https://dx.doi.org/10.1007/978-3-540-38967-5 http://cds.cern.ch/record/1663759 |