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Scanning electron microscopy: physics of image formation and microanalysis
Scanning Electron Microscopy provides a description of the physics of electron-probe formation and of electron-specimen interations The different imaging and analytical modes using secondary and backscattered electrons, electron-beam-induced currents, X-ray and Auger electrons, electron channelling...
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| Lenguaje: | eng |
| Publicado: |
Springer
1998
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| Acceso en línea: | https://dx.doi.org/10.1007/978-3-540-38967-5 http://cds.cern.ch/record/1663759 |
| _version_ | 1780935233446608896 |
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| author | Reimer, Ludwig |
| author_facet | Reimer, Ludwig |
| author_sort | Reimer, Ludwig |
| collection | CERN |
| description | Scanning Electron Microscopy provides a description of the physics of electron-probe formation and of electron-specimen interations The different imaging and analytical modes using secondary and backscattered electrons, electron-beam-induced currents, X-ray and Auger electrons, electron channelling effects, and cathodoluminescence are discussed to evaluate specific contrasts and to obtain quantitative information |
| id | cern-1663759 |
| institution | Organización Europea para la Investigación Nuclear |
| language | eng |
| publishDate | 1998 |
| publisher | Springer |
| record_format | invenio |
| spelling | cern-16637592021-04-21T21:19:16Zdoi:10.1007/978-3-540-38967-5http://cds.cern.ch/record/1663759engReimer, LudwigScanning electron microscopy: physics of image formation and microanalysisGeneral Theoretical PhysicsScanning Electron Microscopy provides a description of the physics of electron-probe formation and of electron-specimen interations The different imaging and analytical modes using secondary and backscattered electrons, electron-beam-induced currents, X-ray and Auger electrons, electron channelling effects, and cathodoluminescence are discussed to evaluate specific contrasts and to obtain quantitative informationSpringeroai:cds.cern.ch:16637591998 |
| spellingShingle | General Theoretical Physics Reimer, Ludwig Scanning electron microscopy: physics of image formation and microanalysis |
| title | Scanning electron microscopy: physics of image formation and microanalysis |
| title_full | Scanning electron microscopy: physics of image formation and microanalysis |
| title_fullStr | Scanning electron microscopy: physics of image formation and microanalysis |
| title_full_unstemmed | Scanning electron microscopy: physics of image formation and microanalysis |
| title_short | Scanning electron microscopy: physics of image formation and microanalysis |
| title_sort | scanning electron microscopy: physics of image formation and microanalysis |
| topic | General Theoretical Physics |
| url | https://dx.doi.org/10.1007/978-3-540-38967-5 http://cds.cern.ch/record/1663759 |
| work_keys_str_mv | AT reimerludwig scanningelectronmicroscopyphysicsofimageformationandmicroanalysis |