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Integration of functional oxides with semiconductors
This unique book describes the basic physical principles of the oxide/semiconductor epitaxy and offers a view of the current state of the field. It shows how this technology enables large-scale integration of oxide electronic and photonic devices, and describes possible hybrid semiconductor/oxide sy...
Autores principales: | , |
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Lenguaje: | eng |
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Springer
2014
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Acceso en línea: | https://dx.doi.org/10.1007/978-1-4614-9320-4 http://cds.cern.ch/record/1666171 |