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Vacuum Arc Ion Sources
The vacuum arc ion source has evolved into a more or less standard laboratory tool for the production of high-current beams of metal ions, and is now used in a number of different embodiments at many laboratories around the world. Applications include primarily ion implantation for material surface...
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| Lenguaje: | eng |
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2014
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| Acceso en línea: | https://dx.doi.org/10.5170/CERN-2013-007.311 http://cds.cern.ch/record/1693045 |