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Semiconductor industry: wafer fab exhaust management
Given the myriad exhaust compounds and the corresponding problems that they can pose in an exhaust management system, the proper choice of such systems is a complex task. Presenting the fundamentals, technical details, and general solutions to real-world problems, Semiconductor Industry: Wafer Fab E...
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| Lenguaje: | eng |
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CRC Press
2005
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| Acceso en línea: | https://dx.doi.org/10.1201/9781420027198 http://cds.cern.ch/record/1695580 |