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MEMS & microsystems: design, manufacture, and nanoscale engineering
A bestselling MEMS text...now better than ever. An engineering design approach to Microelectromechanical Systems, MEMS and Microsystems remains the only available text to cover both the electrical and the mechanical aspects of the technology. In the five years since the publication of the first edi...
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| Lenguaje: | eng |
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Wiley
2008
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| Acceso en línea: | http://cds.cern.ch/record/1704516 |