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MEMS & microsystems: design, manufacture, and nanoscale engineering

A bestselling MEMS text...now better than ever. An engineering design approach to Microelectromechanical Systems, MEMS and Microsystems remains the only available text to cover both the electrical and the mechanical aspects of the technology. In the five years since the publication of the first edi...

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Detalles Bibliográficos
Autor principal: Hsu, Tai-Ran
Lenguaje:eng
Publicado: Wiley 2008
Materias:
Acceso en línea:http://cds.cern.ch/record/1704516
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author Hsu, Tai-Ran
author_facet Hsu, Tai-Ran
author_sort Hsu, Tai-Ran
collection CERN
description A bestselling MEMS text...now better than ever. An engineering design approach to Microelectromechanical Systems, MEMS and Microsystems remains the only available text to cover both the electrical and the mechanical aspects of the technology. In the five years since the publication of the first edition, there have been significant changes in the science and technology of miniaturization, including microsystems technology and nanotechnology. In response to the increasing needs of engineers to acquire basic knowledge and experience in these areas, this popular text has been carefully updated, including an entirely new section on the introduction of nanoscale engineering. Following a brief introduction to the history and evolution of nanotechnology, the author covers the fundamentals in the engineering design of nanostructures, including fabrication techniques for producing nanoproducts, engineering design principles in molecular dynamics, and fluid flows and heat transmission in nanoscale substances.
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spelling cern-17045162021-04-21T21:01:13Zhttp://cds.cern.ch/record/1704516engHsu, Tai-RanMEMS & microsystems: design, manufacture, and nanoscale engineeringEngineeringA bestselling MEMS text...now better than ever. An engineering design approach to Microelectromechanical Systems, MEMS and Microsystems remains the only available text to cover both the electrical and the mechanical aspects of the technology. In the five years since the publication of the first edition, there have been significant changes in the science and technology of miniaturization, including microsystems technology and nanotechnology. In response to the increasing needs of engineers to acquire basic knowledge and experience in these areas, this popular text has been carefully updated, including an entirely new section on the introduction of nanoscale engineering. Following a brief introduction to the history and evolution of nanotechnology, the author covers the fundamentals in the engineering design of nanostructures, including fabrication techniques for producing nanoproducts, engineering design principles in molecular dynamics, and fluid flows and heat transmission in nanoscale substances.Wileyoai:cds.cern.ch:17045162008
spellingShingle Engineering
Hsu, Tai-Ran
MEMS & microsystems: design, manufacture, and nanoscale engineering
title MEMS & microsystems: design, manufacture, and nanoscale engineering
title_full MEMS & microsystems: design, manufacture, and nanoscale engineering
title_fullStr MEMS & microsystems: design, manufacture, and nanoscale engineering
title_full_unstemmed MEMS & microsystems: design, manufacture, and nanoscale engineering
title_short MEMS & microsystems: design, manufacture, and nanoscale engineering
title_sort mems & microsystems: design, manufacture, and nanoscale engineering
topic Engineering
url http://cds.cern.ch/record/1704516
work_keys_str_mv AT hsutairan memsmicrosystemsdesignmanufactureandnanoscaleengineering