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Computational explorations in magnetron sputtering
Magnetron Sputtering is a widely used industrial process for depositing thin films. PVD films are found in everything from the moisture barriers in potato chip bags to the interconnects of modern semiconductor devices. This book walks you through the physics of Magnetron Sputtering in a step-by-st...
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| Lenguaje: | eng |
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Basic Numerics Press
2014
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| Acceso en línea: | http://cds.cern.ch/record/1969710 |