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Experience on 3D Silicon Sensors for ATLAS IBL

3D silicon sensors, where plasma micro-machining is used to etch deep narrow apertures in the silicon substrate to form electrodes of PIN junctions, represent possible solutions for inner pixel layers of the tracking detectors in high energy physics experiments. This type of sensors has been develop...

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Autor principal: Darbo, G.
Formato: info:eu-repo/semantics/article
Lenguaje:eng
Publicado: JINST 2014
Materias:
Acceso en línea:https://dx.doi.org/10.1088/1748-0221/10/05/C05001
http://cds.cern.ch/record/1971961
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author Darbo, G.
author_facet Darbo, G.
author_sort Darbo, G.
collection CERN
description 3D silicon sensors, where plasma micro-machining is used to etch deep narrow apertures in the silicon substrate to form electrodes of PIN junctions, represent possible solutions for inner pixel layers of the tracking detectors in high energy physics experiments. This type of sensors has been developed for the Insertable B-Layer (IBL), an additional pixel layer that has been installed in ATLAS during the present shutdown of the LHC collider at CERN. It is presented here the experience in designing, testing and qualifying sensors and detector modules that have been used to equip part of the IBL. Based on the gained experience with 3D silicon sensors for the ATLAS IBL, we discuss possible new developments for the upgrade of ATLAS and CMS at the high-luminosity LHC (HL-LHC).
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spelling cern-19719612021-09-17T02:51:19Z doi:10.1088/1748-0221/10/05/C05001 http://cds.cern.ch/record/1971961 eng Darbo, G. Experience on 3D Silicon Sensors for ATLAS IBL Particle Physics - Experiment Detectors and Experimental Techniques 9: Advanced infrastructures for detector R&D 9.3: Precision Pixel Detectors 3D silicon sensors, where plasma micro-machining is used to etch deep narrow apertures in the silicon substrate to form electrodes of PIN junctions, represent possible solutions for inner pixel layers of the tracking detectors in high energy physics experiments. This type of sensors has been developed for the Insertable B-Layer (IBL), an additional pixel layer that has been installed in ATLAS during the present shutdown of the LHC collider at CERN. It is presented here the experience in designing, testing and qualifying sensors and detector modules that have been used to equip part of the IBL. Based on the gained experience with 3D silicon sensors for the ATLAS IBL, we discuss possible new developments for the upgrade of ATLAS and CMS at the high-luminosity LHC (HL-LHC). 3D silicon sensors, where plasma micro-machining is used to etch deep narrow apertures in the silicon substrate to form electrodes of PIN junctions, represent possible solutions for inner pixel layers of the tracking detectors in high energy physics experiments. This type of sensors has been developed for the Insertable B-Layer (IBL), an additional pixel layer that has been installed in ATLAS during the present shutdown of the LHC collider at CERN. It is presented here the experience in designing, testing and qualifying sensors and detector modules that have been used to equip part of the IBL. Based on the gained experience with 3D silicon sensors for the ATLAS IBL, we discuss possible new developments for the upgrade of ATLAS and CMS at the high-luminosity LHC (HL-LHC). 3D silicon sensors, where plasma micro-machining is used to etch deep narrow apertures in the silicon substrate to form electrodes of PIN junctions, represent possible solutions for inner pixel layers of the tracking detectors in high energy physics experiments. This type of sensors has been developed for the Insertable B-Layer (IBL), an additional pixel layer that has been installed in ATLAS during the present shutdown of the LHC collider at CERN. It is presented here the experience in designing, testing and qualifying sensors and detector modules that have been used to equip part info:eu-repo/grantAgreement/EC/FP7/262025 info:eu-repo/semantics/openAccess Education Level info:eu-repo/semantics/article http://cds.cern.ch/record/1971961 JINST JINST, (2015) pp. C05001 2014-11-25
spellingShingle Particle Physics - Experiment
Detectors and Experimental Techniques
9: Advanced infrastructures for detector R&D
9.3: Precision Pixel Detectors
Darbo, G.
Experience on 3D Silicon Sensors for ATLAS IBL
title Experience on 3D Silicon Sensors for ATLAS IBL
title_full Experience on 3D Silicon Sensors for ATLAS IBL
title_fullStr Experience on 3D Silicon Sensors for ATLAS IBL
title_full_unstemmed Experience on 3D Silicon Sensors for ATLAS IBL
title_short Experience on 3D Silicon Sensors for ATLAS IBL
title_sort experience on 3d silicon sensors for atlas ibl
topic Particle Physics - Experiment
Detectors and Experimental Techniques
9: Advanced infrastructures for detector R&D
9.3: Precision Pixel Detectors
url https://dx.doi.org/10.1088/1748-0221/10/05/C05001
http://cds.cern.ch/record/1971961
http://cds.cern.ch/record/1971961
work_keys_str_mv AT darbog experienceon3dsiliconsensorsforatlasibl