Micro and nano fabrication: tools and processes

For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes...

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Detalles Bibliográficos
Autores principales: Gatzen, Hans H, Saile, Volker, Leuthold, Jürg
Lenguaje:eng
Publicado: Springer 2015
Materias:
Engineering
Acceso en línea:https://dx.doi.org/10.1007/978-3-662-44395-8
http://cds.cern.ch/record/1987432

Internet

https://dx.doi.org/10.1007/978-3-662-44395-8
http://cds.cern.ch/record/1987432

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