Micro and nano fabrication: tools and processes

For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes...

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Detalles Bibliográficos
Autores principales: Gatzen, Hans H, Saile, Volker, Leuthold, Jürg
Lenguaje:eng
Publicado: Springer 2015
Materias:
Engineering
Acceso en línea:https://dx.doi.org/10.1007/978-3-662-44395-8
http://cds.cern.ch/record/1987432
_version_ 1780945500372992000
author Gatzen, Hans H
Saile, Volker
Leuthold, Jürg
author_facet Gatzen, Hans H
Saile, Volker
Leuthold, Jürg
author_sort Gatzen, Hans H
collection CERN
description For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.
id cern-1987432
institution Organización Europea para la Investigación Nuclear
language eng
publishDate 2015
publisher Springer
record_format invenio
spelling cern-19874322021-04-21T20:34:37Zdoi:10.1007/978-3-662-44395-8http://cds.cern.ch/record/1987432engGatzen, Hans HSaile, VolkerLeuthold, JürgMicro and nano fabrication: tools and processesEngineeringFor Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.Springeroai:cds.cern.ch:19874322015
spellingShingle Engineering
Gatzen, Hans H
Saile, Volker
Leuthold, Jürg
Micro and nano fabrication: tools and processes
title Micro and nano fabrication: tools and processes
title_full Micro and nano fabrication: tools and processes
title_fullStr Micro and nano fabrication: tools and processes
title_full_unstemmed Micro and nano fabrication: tools and processes
title_short Micro and nano fabrication: tools and processes
title_sort micro and nano fabrication: tools and processes
topic Engineering
url https://dx.doi.org/10.1007/978-3-662-44395-8
http://cds.cern.ch/record/1987432
work_keys_str_mv AT gatzenhansh microandnanofabricationtoolsandprocesses
AT sailevolker microandnanofabricationtoolsandprocesses
AT leutholdjurg microandnanofabricationtoolsandprocesses

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