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Micro and nano fabrication: tools and processes
For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes...
| Autores principales: | , , |
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| Lenguaje: | eng |
| Publicado: |
Springer
2015
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| Materias: | |
| Acceso en línea: | https://dx.doi.org/10.1007/978-3-662-44395-8 http://cds.cern.ch/record/1987432 |