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Chemical vapor deposition polymerization: the growth and properties of parylene thin films
Chemical Vapor Deposition Polymerization - The Growth and Properties of Parylene Thin Films is intended to be valuable to both users and researchers of parylene thin films. It should be particularly useful for those setting up and characterizing their first research deposition system. It provides a...
| Autores principales: | , |
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| Lenguaje: | eng |
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Springer
2004
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| Acceso en línea: | https://dx.doi.org/10.1007/978-1-4757-3901-5 http://cds.cern.ch/record/2006440 |