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Thermal sensors: principles and applications for semiconductor industries
This book is a comprehensive guide to both the fundamentals of thermal sensors and their advanced functions. Key topics include sensor materials, CMOS-compatible sensors, measurement capabilities, thermal management and manufacturing processes. The introductory chapter covers the basic principles of...
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Lenguaje: | eng |
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Springer
2015
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Acceso en línea: | https://dx.doi.org/10.1007/978-1-4939-2581-0 http://cds.cern.ch/record/2015263 |