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NSF/AFOSR/ASME Workshop on Tribology Issues and Opportunities in MEMS
Micro Electro Mechanical Systems (MEMS) is already about a billion dollars a year industry and is growing rapidly. So far major emphasis has been placed on the fabrication processes for various devices. There are serious issues related to tribology, mechanics, surfacechemistry and materials science...
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| Lenguaje: | eng |
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Springer
1998
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| Acceso en línea: | https://dx.doi.org/10.1007/978-94-011-5050-7 http://cds.cern.ch/record/2033609 |