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Plasma diagnostics: surface analysis and interactions
Plasmas and their interaction with materials have become subjects of major interest because of their importance in modern forefront technologies such as microelectronics, fusion energy, and space. Plasmas are used in microelectronics to process semiconductors (etching of patterns for microcircuits,...
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| Lenguaje: | eng |
| Publicado: |
Elsevier Science
2013
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| Acceso en línea: | http://cds.cern.ch/record/2050256 |