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Diffusivity in silicon 1953 to 2009
This work is essentially an update of previous compilations of information on the diffusivity of elements in semiconductor-grade silicon. It subsumes the data contained in B.L.Sharma's monograph on 'Diffusion in Semiconductors' (Trans Tech Publications, 1970), plus the data contained...
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| Lenguaje: | eng |
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Trans Tech Publ.
2010
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| Acceso en línea: | http://cds.cern.ch/record/2123183 |