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SU-8 as a Material for Microfabricated Particle Physics Detectors
Several recent detector te chnologies developed for particle physics applications are based on microfabricated structures. Dete ctors built with this approach generally exhibit the overall best performance in te rms of spatial and time resolution. Many properties of the SU-8 photoepoxy make it...
Autores principales: | , , , |
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Lenguaje: | eng |
Publicado: |
2014
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Materias: | |
Acceso en línea: | https://dx.doi.org/10.3390/mi5030594 http://cds.cern.ch/record/2137119 |