SU-8 as a Material for Microfabricated Particle Physics Detectors

Several recent detector te chnologies developed for particle physics applications are based on microfabricated structures. Dete ctors built with this approach generally exhibit the overall best performance in te rms of spatial and time resolution. Many properties of the SU-8 photoepoxy make it suitable for the manufacturing of microstructured particle detectors. This arti cle aims to review some emerging detector technologies making use of SU-8 microstructu ring, namely micropatte rn gaseous detectors and microfluidic scintillation detectors. Th e general working principle and main process steps for the fabrication of each device are reported, with a focus on the advantages brought to the device functionality by the us e of SU-8. A novel process based on multiple bonding steps for the fabrication of thin multila yer microfluidic scin tillation detectors developed by the authors is presented. Finally, a brief overview of the applications for the discussed devices is given.