Handbook of silicon based MEMS materials and technologies

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A comprehensive, well-proven reference work on state-of-the-art MEMS materials, technologies and manufacturing, emphasizing current and future applications

Detalles Bibliográficos
Autores principales: Tilli, Markku, Motooka, Teruaki, Airaksinen, Veli-Matti, Franssila, Sami, Paulasto-Krockel, Mervi, Lindroos, Veikko
Lenguaje:eng
Publicado: Elsevier 2015
Acceso en línea:http://cds.cern.ch/record/2157854

Internet

http://cds.cern.ch/record/2157854

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