Handbook of silicon based MEMS materials and technologies

Mostrar otras versiones (1)

A comprehensive, well-proven reference work on state-of-the-art MEMS materials, technologies and manufacturing, emphasizing current and future applications

Detalles Bibliográficos
Autores principales: Tilli, Markku, Motooka, Teruaki, Airaksinen, Veli-Matti, Franssila, Sami, Paulasto-Krockel, Mervi, Lindroos, Veikko
Lenguaje:eng
Publicado: Elsevier 2015
Acceso en línea:http://cds.cern.ch/record/2157854
_version_ 1780950760111996928
author Tilli, Markku
Motooka, Teruaki
Airaksinen, Veli-Matti
Franssila, Sami
Paulasto-Krockel, Mervi
Lindroos, Veikko
author_facet Tilli, Markku
Motooka, Teruaki
Airaksinen, Veli-Matti
Franssila, Sami
Paulasto-Krockel, Mervi
Lindroos, Veikko
author_sort Tilli, Markku
collection CERN
description A comprehensive, well-proven reference work on state-of-the-art MEMS materials, technologies and manufacturing, emphasizing current and future applications
id cern-2157854
institution Organización Europea para la Investigación Nuclear
language eng
publishDate 2015
publisher Elsevier
record_format invenio
spelling cern-21578542021-04-21T19:40:36Zhttp://cds.cern.ch/record/2157854engTilli, MarkkuMotooka, TeruakiAiraksinen, Veli-MattiFranssila, SamiPaulasto-Krockel, MerviLindroos, VeikkoHandbook of silicon based MEMS materials and technologiesA comprehensive, well-proven reference work on state-of-the-art MEMS materials, technologies and manufacturing, emphasizing current and future applicationsElsevieroai:cds.cern.ch:21578542015
spellingShingle Tilli, Markku
Motooka, Teruaki
Airaksinen, Veli-Matti
Franssila, Sami
Paulasto-Krockel, Mervi
Lindroos, Veikko
Handbook of silicon based MEMS materials and technologies
title Handbook of silicon based MEMS materials and technologies
title_full Handbook of silicon based MEMS materials and technologies
title_fullStr Handbook of silicon based MEMS materials and technologies
title_full_unstemmed Handbook of silicon based MEMS materials and technologies
title_short Handbook of silicon based MEMS materials and technologies
title_sort handbook of silicon based mems materials and technologies
url http://cds.cern.ch/record/2157854
work_keys_str_mv AT tillimarkku handbookofsiliconbasedmemsmaterialsandtechnologies
AT motookateruaki handbookofsiliconbasedmemsmaterialsandtechnologies
AT airaksinenvelimatti handbookofsiliconbasedmemsmaterialsandtechnologies
AT franssilasami handbookofsiliconbasedmemsmaterialsandtechnologies
AT paulastokrockelmervi handbookofsiliconbasedmemsmaterialsandtechnologies
AT lindroosveikko handbookofsiliconbasedmemsmaterialsandtechnologies

Ejemplares similares