Cargando…

Handbook of silicon based MEMS materials and technologies

Mostrar otras versiones (1)

A comprehensive, well-proven reference work on state-of-the-art MEMS materials, technologies and manufacturing, emphasizing current and future applications

Detalles Bibliográficos
Autores principales:	Tilli, Markku, Motooka, Teruaki, Airaksinen, Veli-Matti, Franssila, Sami, Paulasto-Krockel, Mervi, Lindroos, Veikko
Lenguaje:	eng
Publicado:	Elsevier 2015
Acceso en línea:	http://cds.cern.ch/record/2157854

Ejemplares similares

Handbook of silicon based MEMS materials and technologies
por: Lindroos, Veikko
Publicado: (2010)

Chemically Stable Atomic-Layer-Deposited Al(2)O(3) Films for Processability
por: Broas, Mikael, et al.
Publicado: (2017)

Aluminum Nitride to Silicon Direct Bonding for an Alternative Silicon-On-Insulator Platform
por: Kaaos, Jani, et al.
Publicado: (2021)

Detection of In-Plane Movement in Electrically Actuated Microelectromechanical Systems Using a Scanning Electron Microscope
por: Nieminen, Tarmo, et al.
Publicado: (2023)

Interfacial Compatibility in Microelectronics: Moving Away from the Trial and Error Approach
por: Laurila, Tomi, et al.
Publicado: (2012)

The MEMS handbook
Publicado: (2006)

Handbook of silicon wafer cleaning technology
por: Reinhardt, Karen, et al.
Publicado: (2018)

Handbook of MEMS for wireless and mobile applications
por: Uttamchandani, Deepak
Publicado: (2013)

Key Processes of Silicon-On-Glass MEMS Fabrication Technology for Gyroscope Application
por: Ma, Zhibo, et al.
Publicado: (2018)

A Review of Symmetric Silicon MEMS Gyroscope Mode-Matching Technologies
por: Zhang, Han, et al.
Publicado: (2022)

Integrated silicon photonic MEMS
por: Quack, Niels, et al.
Publicado: (2023)

Silicon wet bulk micromachining for MEMS
por: Pal, Prem, et al.
Publicado: (2017)

A Three-Dimensional Microdisplacement Sensing System Based on MEMS Bulk-Silicon Technology
por: Wu, Junjie, et al.
Publicado: (2014)

Bottom-Up Copper Filling of Large Scale Through Silicon Vias for MEMS Technology
por: Menk, L.A., et al.
Publicado: (2018)

A Miniature Four-Channel Ion Trap Array Based on Non-silicon MEMS Technology
por: Zhang, Qi, et al.
Publicado: (2021)

Non-Lithographic Silicon Micromachining Using Inkjet and Chemical Etching
por: Hoshian, Sasha, et al.
Publicado: (2016)

Handbook of silicon photonics
por: Vivien, Laurent, et al.
Publicado: (2013)

Materials and failures in MEMS and NEMS
por: Tiwari, Atul, et al.
Publicado: (2015)

Nano-tribology and materials in MEMS
por: Sinha, Sujeet, et al.
Publicado: (2013)

MEMS and MOEMS technology and applications
por: Rai-Choudhury, Prosenjit
Publicado: (2000)

Enabling technology for MEMS and nanodevices
por: Baltes, Henry, et al.
Publicado: (2004)

Enabling technology for MEMS and nanodevices
por: Baltes, Henry, et al.
Publicado: (2013)

MEMS: fundamental technology and applications
por: Choudhary, Vikas, et al.
Publicado: (2013)

Microfluidics and MEMS Technology for Membranes
por: Casals-Terré, Jasmina
Publicado: (2022)

Analysis of Frequency Drift of Silicon MEMS Resonator with Temperature
por: Jiang, Bo, et al.
Publicado: (2020)

Workshop on Factual Material Data Banks
por: Kröckel, H, et al.
Publicado: (1985)

Concluding Workshop of the Materials Database Demonstrator Programme
por: Swindells, N, et al.
Publicado: (1989)

Fabrication of elastic, conductive, wear-resistant superhydrophobic composite material
por: Mirmohammadi, Seyed Mehran, et al.
Publicado: (2021)

Smart material systems and MEMS : design and development methodologies
por: Varadan, V. K., 1943-
Publicado: (2006)

RF MEMS: theory, design, and technology
por: Rebeiz, Gabriel M
Publicado: (2003)

CMOS MEMS Fabrication Technologies and Devices
por: Qu, Hongwei
Publicado: (2016)

Measurement and Isolation of Thermal Stress in Silicon-On-Glass MEMS Structures
por: Chen, Zhiyong, et al.
Publicado: (2018)

Direct Detection of Akhiezer Damping in a Silicon MEMS Resonator
por: Rodriguez, Janna, et al.
Publicado: (2019)

Fusing MEMS technology with lab-on-chip: nanoliter-scale silicon microcavity arrays for digital DNA quantification and multiplex testing
por: Podbiel, Daniel, et al.
Publicado: (2020)

High-Consistency Optical Fiber Fabry–Perot Pressure Sensor Based on Silicon MEMS Technology for High Temperature Environment
por: Feng, Fei, et al.
Publicado: (2021)

Silicon controlled rectifier designers' handbook
por: Murray, Robert
Publicado: (1963)

Silicon controlled rectifier designers handbook
por: Rice, Leslie R
Publicado: (1970)

Hybrid microcircuit technology handbook: materials, processes, design, testing and production
por: Licari, James J, et al.
Publicado: (1998)

Basic Science Symposium II: MEMS Technology
por: Roy, Shuvo, et al.
Publicado: (2008)

Integrated Temperature and Hydrogen Sensors with MEMS Technology
por: Jiang, Hongchuan, et al.
Publicado: (2017)

Cannot write session to /tmp/vufind_sessions/sess_g7gtv16uqpsepmj4n0l33jh48a