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Materials science in microelectronics I: the relationships between thin film processing and structure
Thin films play a key role in the material science of microelectronics, and the subject matter of thin-films divides naturally into two headings: processing / structure relationship, and structure / properties relationship.The first volume of Materials Science in Microelectronics focuses on the fir...
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| Lenguaje: | eng |
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Elsevier
2005
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| Acceso en línea: | http://cds.cern.ch/record/2222412 |