Materials science in microelectronics I: the relationships between thin film processing and structure

Thin films play a key role in the material science of microelectronics, and the subject matter of thin-films divides naturally into two headings: processing / structure relationship, and structure / properties relationship.The first volume of Materials Science in Microelectronics focuses on the fir...

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Detalles Bibliográficos
Autor principal: Machlin, Eugene
Lenguaje:eng
Publicado: Elsevier 2005
Materias:
Engineering
Acceso en línea:http://cds.cern.ch/record/2222412
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author Machlin, Eugene
author_facet Machlin, Eugene
author_sort Machlin, Eugene
collection CERN
description Thin films play a key role in the material science of microelectronics, and the subject matter of thin-films divides naturally into two headings: processing / structure relationship, and structure / properties relationship.The first volume of Materials Science in Microelectronics focuses on the first relationship - that between processing and the structure of the thin-film. The state of the thin film's surface during the period that one monolayer exists - before being buried in the next layer - determines the ultimate structure of the thin film, and thus its properties. This
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institution Organización Europea para la Investigación Nuclear
language eng
publishDate 2005
publisher Elsevier
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spelling cern-22224122021-04-21T19:29:41Zhttp://cds.cern.ch/record/2222412engMachlin, EugeneMaterials science in microelectronics I: the relationships between thin film processing and structureEngineeringThin films play a key role in the material science of microelectronics, and the subject matter of thin-films divides naturally into two headings: processing / structure relationship, and structure / properties relationship.The first volume of Materials Science in Microelectronics focuses on the first relationship - that between processing and the structure of the thin-film. The state of the thin film's surface during the period that one monolayer exists - before being buried in the next layer - determines the ultimate structure of the thin film, and thus its properties. ThisElsevieroai:cds.cern.ch:22224122005
spellingShingle Engineering
Machlin, Eugene
Materials science in microelectronics I: the relationships between thin film processing and structure
title Materials science in microelectronics I: the relationships between thin film processing and structure
title_full Materials science in microelectronics I: the relationships between thin film processing and structure
title_fullStr Materials science in microelectronics I: the relationships between thin film processing and structure
title_full_unstemmed Materials science in microelectronics I: the relationships between thin film processing and structure
title_short Materials science in microelectronics I: the relationships between thin film processing and structure
title_sort materials science in microelectronics i: the relationships between thin film processing and structure
topic Engineering
url http://cds.cern.ch/record/2222412
work_keys_str_mv AT machlineugene materialsscienceinmicroelectronicsitherelationshipsbetweenthinfilmprocessingandstructure

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