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Origin of the lattice sites occupied by implanted Co in Si
We have investigated the lattice location of implanted 61Co in silicon. By means of emission channeling, three different lattice sites have been identified: ideal substitutional sites, displaced bond-centered sites and displaced tetrahedral interstitial sites. To assess the origin of the observed la...
Autores principales: | , , , , , , |
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Lenguaje: | eng |
Publicado: |
2014
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Materias: | |
Acceso en línea: | http://cds.cern.ch/record/2240705 |