Drawing the geometry of 3d transition metal-boron pairs in silicon from electron emission channeling experiments

Although the formation of transition metal-boron pairs is currently well established in silicon processing, the geometry of these complexes is still not completely understood. We investigated the lattice location of the transition metals manganese, iron, cobalt and nickel in n- and p+-type silicon b...

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Detalles Bibliográficos
Autores principales: Silva, Daniel, Wahl, Ulrich, Martins Correia, Joao, Augustyns, Valerie, De Lemos Lima, Tiago Abel, Granadeiro Costa, Angelo Rafael, David Bosne, Eric, Castro Ribeiro Da Silva, Manuel, Esteves De Araujo, Araujo Joao Pedro, Da Costa Pereira, Lino Miguel
Lenguaje:eng
Publicado: 2015
Materias:
Condensed Matter
Acceso en línea:https://dx.doi.org/10.1016/j.nimb.2015.09.051
http://cds.cern.ch/record/2240707

Internet

https://dx.doi.org/10.1016/j.nimb.2015.09.051
http://cds.cern.ch/record/2240707

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