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Drawing the geometry of 3d transition metal-boron pairs in silicon from electron emission channeling experiments
Although the formation of transition metal-boron pairs is currently well established in silicon processing, the geometry of these complexes is still not completely understood. We investigated the lattice location of the transition metals manganese, iron, cobalt and nickel in n- and p+-type silicon b...
| Autores principales: | , , , , , , , , , |
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| Lenguaje: | eng |
| Publicado: |
2015
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| Materias: | |
| Acceso en línea: | https://dx.doi.org/10.1016/j.nimb.2015.09.051 http://cds.cern.ch/record/2240707 |