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Direct observation of the lattice sites of implanted manganese in silicon
Mn-doped Si has attracted significant interest in the context of dilute magnetic semiconductors. We investigated the lattice location of implanted Mn in silicon of different doping types (n, n+ and p+) in the highly dilute regime. Three different lattice sites were identified by means of emission channe...
Autores principales: | , , , , , , , |
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Lenguaje: | eng |
Publicado: |
2015
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Materias: | |
Acceso en línea: | https://dx.doi.org/10.1007/s00339-016-9724-4 http://cds.cern.ch/record/2242912 |