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Outlook and challenges of nano devices, sensors, and MEMS

This book provides readers with an overview of the design, fabrication, simulation, and reliability of nanoscale semiconductor devices, MEMS, and sensors, as they serve for realizing the next-generation internet of things. The authors focus on how the nanoscale structures interact with the electrica...

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Detalles Bibliográficos
Autores principales: Li, Ting, Liu, Ziv
Lenguaje:eng
Publicado: Springer 2017
Materias:
Acceso en línea:https://dx.doi.org/10.1007/978-3-319-50824-5
http://cds.cern.ch/record/2253865