Outlook and challenges of nano devices, sensors, and MEMS

This book provides readers with an overview of the design, fabrication, simulation, and reliability of nanoscale semiconductor devices, MEMS, and sensors, as they serve for realizing the next-generation internet of things. The authors focus on how the nanoscale structures interact with the electrica...

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Detalles Bibliográficos
Autores principales: Li, Ting, Liu, Ziv
Lenguaje:eng
Publicado: Springer 2017
Materias:
Engineering
Acceso en línea:https://dx.doi.org/10.1007/978-3-319-50824-5
http://cds.cern.ch/record/2253865
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author Li, Ting
Liu, Ziv
author_facet Li, Ting
Liu, Ziv
author_sort Li, Ting
collection CERN
description This book provides readers with an overview of the design, fabrication, simulation, and reliability of nanoscale semiconductor devices, MEMS, and sensors, as they serve for realizing the next-generation internet of things. The authors focus on how the nanoscale structures interact with the electrical and/or optical performance, how to find optimal solutions to achieve the best outcome, how these apparatus can be designed via models and simulations, how to improve reliability, and what are the possible challenges and roadblocks moving forward.
id cern-2253865
institution Organización Europea para la Investigación Nuclear
language eng
publishDate 2017
publisher Springer
record_format invenio
spelling cern-22538652021-04-21T19:19:28Zdoi:10.1007/978-3-319-50824-5http://cds.cern.ch/record/2253865engLi, TingLiu, ZivOutlook and challenges of nano devices, sensors, and MEMSEngineeringThis book provides readers with an overview of the design, fabrication, simulation, and reliability of nanoscale semiconductor devices, MEMS, and sensors, as they serve for realizing the next-generation internet of things. The authors focus on how the nanoscale structures interact with the electrical and/or optical performance, how to find optimal solutions to achieve the best outcome, how these apparatus can be designed via models and simulations, how to improve reliability, and what are the possible challenges and roadblocks moving forward.Springeroai:cds.cern.ch:22538652017
spellingShingle Engineering
Li, Ting
Liu, Ziv
Outlook and challenges of nano devices, sensors, and MEMS
title Outlook and challenges of nano devices, sensors, and MEMS
title_full Outlook and challenges of nano devices, sensors, and MEMS
title_fullStr Outlook and challenges of nano devices, sensors, and MEMS
title_full_unstemmed Outlook and challenges of nano devices, sensors, and MEMS
title_short Outlook and challenges of nano devices, sensors, and MEMS
title_sort outlook and challenges of nano devices, sensors, and mems
topic Engineering
url https://dx.doi.org/10.1007/978-3-319-50824-5
http://cds.cern.ch/record/2253865
work_keys_str_mv AT liting outlookandchallengesofnanodevicessensorsandmems
AT liuziv outlookandchallengesofnanodevicessensorsandmems

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