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Outlook and challenges of nano devices, sensors, and MEMS
This book provides readers with an overview of the design, fabrication, simulation, and reliability of nanoscale semiconductor devices, MEMS, and sensors, as they serve for realizing the next-generation internet of things. The authors focus on how the nanoscale structures interact with the electrica...
| Autores principales: | , |
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| Lenguaje: | eng |
| Publicado: |
Springer
2017
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| Acceso en línea: | https://dx.doi.org/10.1007/978-3-319-50824-5 http://cds.cern.ch/record/2253865 |