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Comparison of silicon strip tracker module size using large sensors from 6 inch wafers
Two large silicon strip sensor made from 6 inch wafers are placed next to each other to simulate the size of a CMS outer silicon tracker module. On the left is a prototype 2 sensor CMS inner endcap silicon tracker module made from 4 inch wafers.
Publicado: |
1999
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Acceso en línea: | http://cds.cern.ch/record/2259103 |