Comparison of silicon strip tracker module size using large sensors from 6 inch wafers

Two large silicon strip sensor made from 6 inch wafers are placed next to each other to simulate the size of a CMS outer silicon tracker module. On the left is a prototype 2 sensor CMS inner endcap silicon tracker module made from 4 inch wafers.

Detalles Bibliográficos
Publicado: 1999
Acceso en línea:http://cds.cern.ch/record/2259103
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collection CERN
description Two large silicon strip sensor made from 6 inch wafers are placed next to each other to simulate the size of a CMS outer silicon tracker module. On the left is a prototype 2 sensor CMS inner endcap silicon tracker module made from 4 inch wafers.
id cern-2259103
institution Organización Europea para la Investigación Nuclear
publishDate 1999
record_format invenio
spelling cern-22591032023-10-06T13:03:47Zhttp://cds.cern.ch/record/2259103Comparison of silicon strip tracker module size using large sensors from 6 inch wafersTwo large silicon strip sensor made from 6 inch wafers are placed next to each other to simulate the size of a CMS outer silicon tracker module. On the left is a prototype 2 sensor CMS inner endcap silicon tracker module made from 4 inch wafers.Automated module production for the CMS silicon Microstrip Tracker, no audioAutomated module production for the CMS silicon Microstrip Trackeroai:cds.cern.ch:22591031999
spellingShingle Comparison of silicon strip tracker module size using large sensors from 6 inch wafers
title Comparison of silicon strip tracker module size using large sensors from 6 inch wafers
title_full Comparison of silicon strip tracker module size using large sensors from 6 inch wafers
title_fullStr Comparison of silicon strip tracker module size using large sensors from 6 inch wafers
title_full_unstemmed Comparison of silicon strip tracker module size using large sensors from 6 inch wafers
title_short Comparison of silicon strip tracker module size using large sensors from 6 inch wafers
title_sort comparison of silicon strip tracker module size using large sensors from 6 inch wafers
url http://cds.cern.ch/record/2259103

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