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Mathematical analysis of partial differential equations modeling electrostatic MEMS
Micro- and nanoelectromechanical systems (MEMS and NEMS), which combine electronics with miniature-size mechanical devices, are essential components of modern technology. It is the mathematical model describing "electrostatically actuated" MEMS that is addressed in this monograph. Even the...
| Autores principales: | , , |
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| Lenguaje: | eng |
| Publicado: |
American Mathematical Society
2010
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| Acceso en línea: | http://cds.cern.ch/record/2264147 |