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Principles and applications of nanomems physics
""Principles and Applications of NanoMEMS Physics"" presents the first unified exposition of the physical principles at the heart of NanoMEMS-based devices and applications. In particular, after beginning with a comprehensive presentation of the fundamentals and limitations of na...
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| Lenguaje: | eng |
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Springer
2005
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| Acceso en línea: | http://cds.cern.ch/record/2269111 |