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Principles and applications of nanomems physics
""Principles and Applications of NanoMEMS Physics"" presents the first unified exposition of the physical principles at the heart of NanoMEMS-based devices and applications. In particular, after beginning with a comprehensive presentation of the fundamentals and limitations of na...
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| Lenguaje: | eng |
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Springer
2005
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| Acceso en línea: | http://cds.cern.ch/record/2269111 |
| _version_ | 1780954697834692608 |
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| author | Santos, Hector |
| author_facet | Santos, Hector |
| author_sort | Santos, Hector |
| collection | CERN |
| description | ""Principles and Applications of NanoMEMS Physics"" presents the first unified exposition of the physical principles at the heart of NanoMEMS-based devices and applications. In particular, after beginning with a comprehensive presentation of the fundamentals and limitations of nanotechnology and MEMS fabrication techniques, the book addresses the physics germane to this dimensional regime, namely, quantum wave-particle phenomena, including, the manifestation of charge discreteness, quantized electrostatic actuation, and the Casimir effect, and quantum wave phenomena, including, quantized elect |
| id | cern-2269111 |
| institution | Organización Europea para la Investigación Nuclear |
| language | eng |
| publishDate | 2005 |
| publisher | Springer |
| record_format | invenio |
| spelling | cern-22691112021-04-21T19:11:18Zhttp://cds.cern.ch/record/2269111engSantos, HectorPrinciples and applications of nanomems physicsOther Fields of Physics""Principles and Applications of NanoMEMS Physics"" presents the first unified exposition of the physical principles at the heart of NanoMEMS-based devices and applications. In particular, after beginning with a comprehensive presentation of the fundamentals and limitations of nanotechnology and MEMS fabrication techniques, the book addresses the physics germane to this dimensional regime, namely, quantum wave-particle phenomena, including, the manifestation of charge discreteness, quantized electrostatic actuation, and the Casimir effect, and quantum wave phenomena, including, quantized electSpringeroai:cds.cern.ch:22691112005 |
| spellingShingle | Other Fields of Physics Santos, Hector Principles and applications of nanomems physics |
| title | Principles and applications of nanomems physics |
| title_full | Principles and applications of nanomems physics |
| title_fullStr | Principles and applications of nanomems physics |
| title_full_unstemmed | Principles and applications of nanomems physics |
| title_short | Principles and applications of nanomems physics |
| title_sort | principles and applications of nanomems physics |
| topic | Other Fields of Physics |
| url | http://cds.cern.ch/record/2269111 |
| work_keys_str_mv | AT santoshector principlesandapplicationsofnanomemsphysics |