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Materials science in microelectronics II: the effects of structure on properties in thin films
The subject matter of thin-films - which play a key role in microelectronics - divides naturally into two headings: the processing / structure relationship, and the structure / properties relationship. Part II of 'Materials Science in Microelectronics' focuses on the latter of these relati...
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| Lenguaje: | eng |
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Elsevier Science
2005
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| Acceso en línea: | http://cds.cern.ch/record/2278285 |