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Materials science in microelectronics II: the effects of structure on properties in thin films
The subject matter of thin-films - which play a key role in microelectronics - divides naturally into two headings: the processing / structure relationship, and the structure / properties relationship. Part II of 'Materials Science in Microelectronics' focuses on the latter of these relati...
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Lenguaje: | eng |
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Elsevier Science
2005
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Acceso en línea: | http://cds.cern.ch/record/2278285 |
_version_ | 1780955362788114432 |
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author | Machlin, Eugene |
author_facet | Machlin, Eugene |
author_sort | Machlin, Eugene |
collection | CERN |
description | The subject matter of thin-films - which play a key role in microelectronics - divides naturally into two headings: the processing / structure relationship, and the structure / properties relationship. Part II of 'Materials Science in Microelectronics' focuses on the latter of these relationships, examining the effect of structure on the following: Electrical properties Magnetic properties Optical properties Mechanical properties Mass transport properties Interface and junction properties Defects and properties Captures the importance of thin films to microelectronic development Examines the cause / effect relationship of structure on thin film properties. |
id | cern-2278285 |
institution | Organización Europea para la Investigación Nuclear |
language | eng |
publishDate | 2005 |
publisher | Elsevier Science |
record_format | invenio |
spelling | cern-22782852021-04-21T19:07:15Zhttp://cds.cern.ch/record/2278285engMachlin, EugeneMaterials science in microelectronics II: the effects of structure on properties in thin filmsEngineeringThe subject matter of thin-films - which play a key role in microelectronics - divides naturally into two headings: the processing / structure relationship, and the structure / properties relationship. Part II of 'Materials Science in Microelectronics' focuses on the latter of these relationships, examining the effect of structure on the following: Electrical properties Magnetic properties Optical properties Mechanical properties Mass transport properties Interface and junction properties Defects and properties Captures the importance of thin films to microelectronic development Examines the cause / effect relationship of structure on thin film properties.Elsevier Scienceoai:cds.cern.ch:22782852005 |
spellingShingle | Engineering Machlin, Eugene Materials science in microelectronics II: the effects of structure on properties in thin films |
title | Materials science in microelectronics II: the effects of structure on properties in thin films |
title_full | Materials science in microelectronics II: the effects of structure on properties in thin films |
title_fullStr | Materials science in microelectronics II: the effects of structure on properties in thin films |
title_full_unstemmed | Materials science in microelectronics II: the effects of structure on properties in thin films |
title_short | Materials science in microelectronics II: the effects of structure on properties in thin films |
title_sort | materials science in microelectronics ii: the effects of structure on properties in thin films |
topic | Engineering |
url | http://cds.cern.ch/record/2278285 |
work_keys_str_mv | AT machlineugene materialsscienceinmicroelectronicsiitheeffectsofstructureonpropertiesinthinfilms |