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Materials science in microelectronics II: the effects of structure on properties in thin films

The subject matter of thin-films - which play a key role in microelectronics - divides naturally into two headings: the processing / structure relationship, and the structure / properties relationship. Part II of 'Materials Science in Microelectronics' focuses on the latter of these relati...

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Autor principal: Machlin, Eugene
Lenguaje:eng
Publicado: Elsevier Science 2005
Materias:
Acceso en línea:http://cds.cern.ch/record/2278285
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author Machlin, Eugene
author_facet Machlin, Eugene
author_sort Machlin, Eugene
collection CERN
description The subject matter of thin-films - which play a key role in microelectronics - divides naturally into two headings: the processing / structure relationship, and the structure / properties relationship. Part II of 'Materials Science in Microelectronics' focuses on the latter of these relationships, examining the effect of structure on the following: Electrical properties Magnetic properties Optical properties Mechanical properties Mass transport properties Interface and junction properties Defects and properties Captures the importance of thin films to microelectronic development Examines the cause / effect relationship of structure on thin film properties.
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institution Organización Europea para la Investigación Nuclear
language eng
publishDate 2005
publisher Elsevier Science
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spelling cern-22782852021-04-21T19:07:15Zhttp://cds.cern.ch/record/2278285engMachlin, EugeneMaterials science in microelectronics II: the effects of structure on properties in thin filmsEngineeringThe subject matter of thin-films - which play a key role in microelectronics - divides naturally into two headings: the processing / structure relationship, and the structure / properties relationship. Part II of 'Materials Science in Microelectronics' focuses on the latter of these relationships, examining the effect of structure on the following: Electrical properties Magnetic properties Optical properties Mechanical properties Mass transport properties Interface and junction properties Defects and properties Captures the importance of thin films to microelectronic development Examines the cause / effect relationship of structure on thin film properties.Elsevier Scienceoai:cds.cern.ch:22782852005
spellingShingle Engineering
Machlin, Eugene
Materials science in microelectronics II: the effects of structure on properties in thin films
title Materials science in microelectronics II: the effects of structure on properties in thin films
title_full Materials science in microelectronics II: the effects of structure on properties in thin films
title_fullStr Materials science in microelectronics II: the effects of structure on properties in thin films
title_full_unstemmed Materials science in microelectronics II: the effects of structure on properties in thin films
title_short Materials science in microelectronics II: the effects of structure on properties in thin films
title_sort materials science in microelectronics ii: the effects of structure on properties in thin films
topic Engineering
url http://cds.cern.ch/record/2278285
work_keys_str_mv AT machlineugene materialsscienceinmicroelectronicsiitheeffectsofstructureonpropertiesinthinfilms