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Ion beams in materials processing and analysis
This book covers ion beam application in modern materials research, offering the basics of ion beam physics and technology and a detailed account of the physics of ion-solid interactions for ion implantation, ion beam synthesis, sputtering and nano-patterning.
| Autores principales: | , |
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| Lenguaje: | eng |
| Publicado: |
Springer
2012
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| Materias: | |
| Acceso en línea: | http://cds.cern.ch/record/2278799 |