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Ion beams in materials processing and analysis

This book covers ion beam application in modern materials research, offering the basics of ion beam physics and technology and a detailed account of the physics of ion-solid interactions for ion implantation, ion beam synthesis, sputtering and nano-patterning.

Detalles Bibliográficos
Autores principales: Schmidt, Bernd, Wetzig, Klaus
Lenguaje:eng
Publicado: Springer 2012
Materias:
Acceso en línea:http://cds.cern.ch/record/2278799
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author Schmidt, Bernd
Wetzig, Klaus
author_facet Schmidt, Bernd
Wetzig, Klaus
author_sort Schmidt, Bernd
collection CERN
description This book covers ion beam application in modern materials research, offering the basics of ion beam physics and technology and a detailed account of the physics of ion-solid interactions for ion implantation, ion beam synthesis, sputtering and nano-patterning.
id cern-2278799
institution Organización Europea para la Investigación Nuclear
language eng
publishDate 2012
publisher Springer
record_format invenio
spelling cern-22787992021-04-21T19:06:56Zhttp://cds.cern.ch/record/2278799engSchmidt, BerndWetzig, KlausIon beams in materials processing and analysisOther Fields of PhysicsThis book covers ion beam application in modern materials research, offering the basics of ion beam physics and technology and a detailed account of the physics of ion-solid interactions for ion implantation, ion beam synthesis, sputtering and nano-patterning.Springer oai:cds.cern.ch:22787992012
spellingShingle Other Fields of Physics
Schmidt, Bernd
Wetzig, Klaus
Ion beams in materials processing and analysis
title Ion beams in materials processing and analysis
title_full Ion beams in materials processing and analysis
title_fullStr Ion beams in materials processing and analysis
title_full_unstemmed Ion beams in materials processing and analysis
title_short Ion beams in materials processing and analysis
title_sort ion beams in materials processing and analysis
topic Other Fields of Physics
url http://cds.cern.ch/record/2278799
work_keys_str_mv AT schmidtbernd ionbeamsinmaterialsprocessingandanalysis
AT wetzigklaus ionbeamsinmaterialsprocessingandanalysis