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Ion beams in materials processing and analysis
This book covers ion beam application in modern materials research, offering the basics of ion beam physics and technology and a detailed account of the physics of ion-solid interactions for ion implantation, ion beam synthesis, sputtering and nano-patterning.
| Autores principales: | , |
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| Lenguaje: | eng |
| Publicado: |
Springer
2012
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| Materias: | |
| Acceso en línea: | http://cds.cern.ch/record/2278799 |
| _version_ | 1780955395782606848 |
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| author | Schmidt, Bernd Wetzig, Klaus |
| author_facet | Schmidt, Bernd Wetzig, Klaus |
| author_sort | Schmidt, Bernd |
| collection | CERN |
| description | This book covers ion beam application in modern materials research, offering the basics of ion beam physics and technology and a detailed account of the physics of ion-solid interactions for ion implantation, ion beam synthesis, sputtering and nano-patterning. |
| id | cern-2278799 |
| institution | Organización Europea para la Investigación Nuclear |
| language | eng |
| publishDate | 2012 |
| publisher | Springer |
| record_format | invenio |
| spelling | cern-22787992021-04-21T19:06:56Zhttp://cds.cern.ch/record/2278799engSchmidt, BerndWetzig, KlausIon beams in materials processing and analysisOther Fields of PhysicsThis book covers ion beam application in modern materials research, offering the basics of ion beam physics and technology and a detailed account of the physics of ion-solid interactions for ion implantation, ion beam synthesis, sputtering and nano-patterning.Springer oai:cds.cern.ch:22787992012 |
| spellingShingle | Other Fields of Physics Schmidt, Bernd Wetzig, Klaus Ion beams in materials processing and analysis |
| title | Ion beams in materials processing and analysis |
| title_full | Ion beams in materials processing and analysis |
| title_fullStr | Ion beams in materials processing and analysis |
| title_full_unstemmed | Ion beams in materials processing and analysis |
| title_short | Ion beams in materials processing and analysis |
| title_sort | ion beams in materials processing and analysis |
| topic | Other Fields of Physics |
| url | http://cds.cern.ch/record/2278799 |
| work_keys_str_mv | AT schmidtbernd ionbeamsinmaterialsprocessingandanalysis AT wetzigklaus ionbeamsinmaterialsprocessingandanalysis |