Ion beams in materials processing and analysis

This book covers ion beam application in modern materials research, offering the basics of ion beam physics and technology and a detailed account of the physics of ion-solid interactions for ion implantation, ion beam synthesis, sputtering and nano-patterning.

Detalles Bibliográficos
Autores principales: Schmidt, Bernd, Wetzig, Klaus
Lenguaje:eng
Publicado: Springer 2012
Materias:
Acceso en línea:http://cds.cern.ch/record/2278799

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