MEMS and MOEMS technology and applications

Detalles Bibliográficos
Autor principal: Rai-Choudhury, Prosenjit
Lenguaje:eng
Publicado: Society of Photo-Optical Instrumentation Engineers (SPIE) 2000
Materias:
Engineering
Acceso en línea:http://cds.cern.ch/record/2295920

Internet

http://cds.cern.ch/record/2295920

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