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MEMS and MOEMS technology and applications
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Lenguaje: | eng |
Publicado: |
Society of Photo-Optical Instrumentation Engineers (SPIE)
2000
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Acceso en línea: | http://cds.cern.ch/record/2295920 |
_version_ | 1780956750459961344 |
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author | Rai-Choudhury, Prosenjit |
author_facet | Rai-Choudhury, Prosenjit |
author_sort | Rai-Choudhury, Prosenjit |
collection | CERN |
id | cern-2295920 |
institution | Organización Europea para la Investigación Nuclear |
language | eng |
publishDate | 2000 |
publisher | Society of Photo-Optical Instrumentation Engineers (SPIE) |
record_format | invenio |
spelling | cern-22959202021-04-21T18:59:37Zhttp://cds.cern.ch/record/2295920engRai-Choudhury, ProsenjitMEMS and MOEMS technology and applicationsEngineeringSociety of Photo-Optical Instrumentation Engineers (SPIE)oai:cds.cern.ch:22959202000 |
spellingShingle | Engineering Rai-Choudhury, Prosenjit MEMS and MOEMS technology and applications |
title | MEMS and MOEMS technology and applications |
title_full | MEMS and MOEMS technology and applications |
title_fullStr | MEMS and MOEMS technology and applications |
title_full_unstemmed | MEMS and MOEMS technology and applications |
title_short | MEMS and MOEMS technology and applications |
title_sort | mems and moems technology and applications |
topic | Engineering |
url | http://cds.cern.ch/record/2295920 |
work_keys_str_mv | AT raichoudhuryprosenjit memsandmoemstechnologyandapplications |