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MEMS and MOEMS technology and applications

Detalles Bibliográficos
Autor principal: Rai-Choudhury, Prosenjit
Lenguaje:eng
Publicado: Society of Photo-Optical Instrumentation Engineers (SPIE) 2000
Materias:
Acceso en línea:http://cds.cern.ch/record/2295920
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author Rai-Choudhury, Prosenjit
author_facet Rai-Choudhury, Prosenjit
author_sort Rai-Choudhury, Prosenjit
collection CERN
id cern-2295920
institution Organización Europea para la Investigación Nuclear
language eng
publishDate 2000
publisher Society of Photo-Optical Instrumentation Engineers (SPIE)
record_format invenio
spelling cern-22959202021-04-21T18:59:37Zhttp://cds.cern.ch/record/2295920engRai-Choudhury, ProsenjitMEMS and MOEMS technology and applicationsEngineeringSociety of Photo-Optical Instrumentation Engineers (SPIE)oai:cds.cern.ch:22959202000
spellingShingle Engineering
Rai-Choudhury, Prosenjit
MEMS and MOEMS technology and applications
title MEMS and MOEMS technology and applications
title_full MEMS and MOEMS technology and applications
title_fullStr MEMS and MOEMS technology and applications
title_full_unstemmed MEMS and MOEMS technology and applications
title_short MEMS and MOEMS technology and applications
title_sort mems and moems technology and applications
topic Engineering
url http://cds.cern.ch/record/2295920
work_keys_str_mv AT raichoudhuryprosenjit memsandmoemstechnologyandapplications